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Products of SPTS include SPP, STS (Surface Technology Systems) and Aviza etch & deposition equipment
SPP deals with the following products:
- Silicon deep etching systems
- Compound Semiconductor and Oxide etching systems
- Plasma Enhanced CVD systems
- Silicon oxide sacrificial layer etching systems
- Silicon sacrificial layer etching system
- RIE/CVD system for R&D
STS has developed a complete range of wafer handling platforms, from their CPX cluster tool, which can be configured with up to 4 plasma processing modules with fully automated cassette to cassette handling for high volume manufacturing, to their "entry-level" LPX system with its single-wafer vacuum loadlock and single process module for low volume R&D applications.
Aviza offers critical thin film formation technologies, including atomic layer deposition (ALD), physical vapor deposition (PVD), plasma enhanced chemical vapor deposition (PECVD), plasma etch and thermal processing systems.
For more information on SPTS instruments
visit www.spp-pts.com their main website. |
